High Vacuum Level (mbar):5.0×10−7
No-load Vacuum Level (mbar):5.0×10−7(Room temperature)
Vacuum Cube Leak Rate:1×10−9std/cc/sec
Pressure Regulation in
Multiple Ranges (mbar/Torr):Adjustable
Temperature Uniformity:±2℃
2 - Thermal Shroud
Internal Dimensions (mm)
(straight cylindrical section) - ø 800×800 - ø 1000×1000 - ø 1500×1500
3 - Vacuum Chamber
Internal Dimensions (mm)
(straight cylindrical section) - ø 1000×1000 - ø 1200×1200 - ø 1700×1700
4 - Thermal Plate Dimensions (mm) - 600×500 - 800×700 - 1300×1200
5 - High Vacuum Level (mbar) - 5.0×10−7
6 - No-load Vacuum Level (mbar) - 5.0×10−7(Room temperature)
7 - Pressure Regulation
in Multiple Ranges (mbar/Torr) - Stable pressure operation under the following levels
1.0×10-2 , 1.0×10-3 , 1.0×10-4 , 1.0×10-5 , 1.0×10−6 (Room temperature)
8 - Vacuum Cube Leak Rate - ≤ 1×10-9 std/cc/sec
9 - Refrigeration Mode - A:Thermal sink + Cold plate
B:Thermal sink +Heating cage
C: Liquid nitrogen thermal sink+ Heating cage
(Thermal Sink and cold plate surfaces)
11 - Temperature Uniformity - ±2℃
(Measured at any point on the heat sink
and cold plate under stable conditions
in a vacuum environment)
12 - Temperature Rising /
Falling Speed Rate - -70℃ to 100℃ ≥ 3℃/min
100℃ to -50℃ ≥ 3℃/min (By Mechaincal cooling)
13 - Temperature Rising /
Falling Speed Rate -Optional - -150℃ to 125℃ ≥ 3℃/min
125℃ to -150℃ ≥ 3℃/min (By pressurized GN2 reciculation)
14 - Vacuum Acquisition System - Mechanical Pump / Roots Pump / Molecular Pump / Cryopump
15 - Power - AC380V 3phase 5lines 50/60Hz
16 - We possess the technical expertise to address integrated temperature-humidity control challenges