Electric actuator ATS100

linearfor aircraftball screw

Design Features Long life linear motion guide bearing system Ultra-fine resolution Integral bellows waycovers Low-profile compact design Includes brushless, slotless motor The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications. Outstanding Construction Features ATS100 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability. ATS100 series stages employ a precision-ground ball screw pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High-quality, pre-loaded duplex bearings are used to eliminate axial play.