Electric actuator AHL9000

linearfor aircraftwith servo-motor

Design Features Air-bearing scan axis; mechanical-bearing step axis Dual linear-motor-driven step axis Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback The AHL9000 is the latest addition to Aerotech’s family of air-bearing stages and is an excellent choice for applications that require careful balancing of price and performance. This stage has been designed for demanding applications that require excellent step and scan performance. Applications include wafer inspection, flat panel display manufacturing and optical inspection and fabrication. Hybrid-Bearing Design The AHL9000’s scan axis was designed using proven air-bearing technology developed for the ABL9000 planar air bearing. This axis uses active preload on both the vertical and horizontal surfaces in order to provide outstanding stiffness and dynamic performance. The AHL9000 also takes advantage of the cost-effectiveness of a mechanical bearing step axis. The combination of these two bearing technologies in one stage provides a system that is optimized for step and scan operation.